MODELING, SIMULATION AND TECHNOLOGY OF MICROBEAM STRUCTURES FOR MICROSENSOR APPLICATIONS

MODELING, SIMULATION AND TECHNOLOGY OF MICROBEAM STRUCTURES FOR MICROSENSOR APPLICATIONS

Nano/microcantilevers are structures increasingly utilised for mass detection in nano/microelectromechanical systems (NEMS/MEMS). Resonant detection method, subject of this paper, relies on the change of mass system due to the extraneous substances adsorption.

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Veröffentlicht in:Buletin științific. Series D, Mechanical engineering Mechanical engineering, 2008-01, Vol.70 (3), p.19-30
Hauptverfasser: Ionascu, Georgeta, Bogatu, Lucian, Sandu, Adriana, Manea, Elena, Cernica, Ileana
Format: Artikel
Sprache:eng
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Zusammenfassung:Nano/microcantilevers are structures increasingly utilised for mass detection in nano/microelectromechanical systems (NEMS/MEMS). Resonant detection method, subject of this paper, relies on the change of mass system due to the extraneous substances adsorption.
ISSN:1454-2358