SU-8 2000 rendered cytocompatible for neuronal bioMEMS applications
Microfabrication advances have resulted in small, cheap, and precise devices for biological microelectromechanical systems (bioMEMS). SU‐8/SU‐8 2000 is an attractive material for these applications because of its high‐aspect ratio fabrication capability, dielectric properties, and thermochemical sta...
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Veröffentlicht in: | Journal of Biomedical Materials Research Part B 2009-04, Vol.89A (1), p.138-151 |
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Hauptverfasser: | , , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Microfabrication advances have resulted in small, cheap, and precise devices for biological microelectromechanical systems (bioMEMS). SU‐8/SU‐8 2000 is an attractive material for these applications because of its high‐aspect ratio fabrication capability, dielectric properties, and thermochemical stability. Despite these advantages, the potential toxicity of SU‐8 2000 may limit its use in cell‐based applications. We show that |
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ISSN: | 1549-3296 1552-4965 1552-4981 |
DOI: | 10.1002/jbm.a.31839 |