Micro-hole fabricated inside FOTURAN glass using femtosecond laser writing and chemical etching

Vertical micro-holes were fabricated inside a photosensitive glass (FOTURAN) by focused femtosecond laser (lambda = 775 nm) writing, followed by heat treatment and wet chemical etching in 8% hydrofluoric acid solution for 50 min. The micro-holes were analyzed by optical and scanning electron microscopy, and was found they own circular cross-section and clear edge. At present, micro-holes with aspect ratio of about 7 is achieved. By varying the incident laser fluence in a range of 2.3-36.2 J/cm and the laser writing velocity in 100-1000 mum/s, the influences of femtosecond laser parameters on the formation of micro-holes are characterized as that: writing velocities hardly affect the micro-hole diameter, while relatively lower laser fluences result in smaller diameter, and the cross-section is more circular in this case. The possible reason for this phenomenon is discussed.