Microcantilevers with Nanochannels

Novel microcantilevers withnanochannels fabricated from anodicaluminum oxide (AAO) are described. Cantilevers based on AAO canprecisely control the dimensions ofthe nanochannels and provide surface areas several orders of magnitudelarger than conventional siliconcantilevers with flat surfaces.

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Veröffentlicht in:Advanced materials (Weinheim) 2008-05, Vol.20 (9), p.1732-1737
Hauptverfasser: Lee, Pyung-Soo, Lee, Junghyun, Shin, Nayoung, Lee, Kun-Hong, Lee, Dongkyu, Jeon, Sangmin, Choi, Dukhyun, Hwang, Woonbong, Park, Hyunchul
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Sprache:eng
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Zusammenfassung:Novel microcantilevers withnanochannels fabricated from anodicaluminum oxide (AAO) are described. Cantilevers based on AAO canprecisely control the dimensions ofthe nanochannels and provide surface areas several orders of magnitudelarger than conventional siliconcantilevers with flat surfaces.
ISSN:0935-9648
1521-4095
DOI:10.1002/adma.200701490