CORRELATION BETWEEN SPUTTERING CONDITIONS AND GROWING PROPERTIES OF (TiAl) N/AlN MULTILAYER COATINGS

Multi-layered coatings indicates better thermo/mechanical properties than mono layered coatings in cutting tool applications. In this study, TiAlN/AlN multilayer coatings were produced by diffirent magnetron process parameters. Partilally, magnetron discharge power, bias voltages and N2 flow rate changes growing morphology and surface quality. The microstructure and growing morphologies correlated to sputtering conditions in a range of TiAlN/AlN multi-layer coatings with nanoscale bi-layer period thickness investigated carefully in order to identify the excellent properties of the coatings. The crystal structure of multilayer films was determined by XRD analysis. Surface and fracture surfaces were characterized by scanning electron microscopy (SEM).