Observation of Crystal Orientation, Domain and Domain Switching in Ferroelectric Ceramics by EBSP Method

Piezoelectric ceramics are widely applied to the components of electric devices and actuators. Therefore, the reliabilities of PZT are very important. In this study, the domains in a crystal of PZT were observed by the EBSP method. However, it was very difficult to observe the crystal orientations and domains by EBSP method, because PZT ceramics were non-conducting materials and solid solutions. But, by using the acid chemical etching in combination with mechanical polishing for specimen surface finishing, the laminar domain structures on a nanoscale, were able to be observed by EBSP method. In addition, observation of domain switching behavior by Vicker's indentation test was conducted. The specimen was poled in the across-the-width direction (PS specimens) parallel to the crack front line. After the indentation tests, the mechanical loading-induced domains switching, 90° domain switching, were observed by EBSP method. Especially, the domain switching was most obvious in the intensity change of the (001) pole figure. The c-direction before loading was changed into two mutually-perpendicular directions by the mechanical loading.