Diffractive Optical Elements based in Diamond Like Carbon (DLC) films

In this work was developed a Diffractive Optical Elements (DOEs) based in amorphous hydrogenated carbon (Diamond Like Carbon) films. DOEs can be built in large scale with high reproducibility and eliminating almost stages used in optical elements tradicional fabrication, as abrasion and burnishing. These devices had been built by the etching of DLC deposited by sputtering process. The characterizations of these devices are realized by optical analyzes with a 633 nm HeNe laser. The DLC films roughness and etch rate after process were measured by high step meter.