A Fully Planar Approach to the Construction of X-Ray Microcalorimeters with Doped Germanium Sensors

A Fully Planar Approach to the Construction of X-Ray Microcalorimeters with Doped Germanium Sensors

We have investigated a fully planar technology for the development of arrays of X-ray microcalorimeters with doped germanium thermal sensor. We describe the proposed approach and show promising results obtained with the deep etching of germanium, the most critical step of the whole process.

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Veröffentlicht in:Journal of low temperature physics 2008-04, Vol.151 (1-2), p.387-393
Hauptverfasser: Chianetta, G., Arnone, C., Barbera, M., Beeman, J., Collura, A., Lullo, G., Perinati, E., Silver, E.
Format: Artikel
Sprache:eng
Schlagworte:
Characterization and Evaluation of Materials
Condensed Matter Physics
Magnetic Materials
Magnetism
Physics
Physics and Astronomy
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Zusammenfassung:We have investigated a fully planar technology for the development of arrays of X-ray microcalorimeters with doped germanium thermal sensor. We describe the proposed approach and show promising results obtained with the deep etching of germanium, the most critical step of the whole process.
ISSN:0022-2291
1573-7357
DOI:10.1007/s10909-007-9662-9