Interfacial metallurgical reaction between small flip-chip Sn/Au bumps and thin Au/TiW metallization under multiple reflow
The interfacial reaction between Sn/Au bumps and a thin Au/TiW metallization was investigated. It was found that for 60 μm bumps, the pad metallization was not reliable and large voids were generated after multiple reflow cycles due to the dewetting between eutectic AuSn and TiW. For 40 and 20 μm bu...
Gespeichert in:
Veröffentlicht in: | Scripta materialia 2008-04, Vol.58 (7), p.606-609 |
---|---|
Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The interfacial reaction between Sn/Au bumps and a thin Au/TiW metallization was investigated. It was found that for 60
μm bumps, the pad metallization was not reliable and large voids were generated after multiple reflow cycles due to the dewetting between eutectic AuSn and TiW. For 40 and 20
μm bumps, the Au/TiW was quite stable and the joints could be entirely composed of TiW/Au
5Sn/Au because of the wetting on the side walls of the Au socket. |
---|---|
ISSN: | 1359-6462 1872-8456 |
DOI: | 10.1016/j.scriptamat.2007.11.020 |