Tunable bandstop MEMS filter for millimetre-wave applications

The design and realisation of original millimetre-wave tunable bandstop filters using MEMS (micro-electro-mechanical-systems) technology for millimetre-wave applications is presented. The tunable behaviour is achieved by using MEMS switches. The overall structures, including the MEMS switches, have...

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Veröffentlicht in:	Electronics letters 2007-06, Vol.43 (12), p.675-677
Hauptverfasser:	TAKACS, A, NECULOIU, D, VASILACHE, D, MULLER, A, PONS, P, BARY, L, CALMON, P, AUBERT, H, PLANA, R
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Circuit properties Electric, optical and optoelectronic circuits Electronic circuits Electronics Exact sciences and technology Frequency filters Micro- and nanoelectromechanical devices (mems/nems) Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Switching, multiplexing, switched capacity circuits
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Beschreibung
Zusammenfassung:	The design and realisation of original millimetre-wave tunable bandstop filters using MEMS (micro-electro-mechanical-systems) technology for millimetre-wave applications is presented. The tunable behaviour is achieved by using MEMS switches. The overall structures, including the MEMS switches, have been manufactured using dielectric membrane in order to minimise the dielectric losses. Experimental validations are reported and validate the proposed topology: the bandstop frequency is shifted by approximately 3.5GHz in V-band when the switches are actuated.
ISSN:	0013-5194 1350-911X
DOI:	10.1049/el:20070366