Direct metallization of gold patterns on polyimide substrate by microcontact printing and selective surface modification

Patterned gold microstructures were fabricated on a polymer substrate by a novel method involving selective electroless plating and microcontact printing. The micro-sized gold patterns were made by the site-selective chemical modification of polyimide substrate films using aqueous potassium hydroxid...

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Veröffentlicht in:Microelectronic engineering 2008, Vol.85 (1), p.136-142
Hauptverfasser: Yoon, S.S., Kim, D.O., Park, S.C., Lee, Y.K., Chae, H.Y., Jung, S.B., Nam, J.-D.
Format: Artikel
Sprache:eng
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Zusammenfassung:Patterned gold microstructures were fabricated on a polymer substrate by a novel method involving selective electroless plating and microcontact printing. The micro-sized gold patterns were made by the site-selective chemical modification of polyimide substrate films using aqueous potassium hydroxide solution and microcontact printing with a pitch size in the range of 20–200 μm. The base-treated area of the polyimide film became hydrophilic in the regions where the ion-exchange reactions took place for the subsequent metallization. The hydrophilic patterns were sensitized by placing the film in a solution of PdCl 2 and, subsequently, the activated substrate was immersed in an electroless plating solution of Ni and Au to provide well-developed gold patterns on polyimide substrate films.
ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2007.04.142