Direct metallization of gold patterns on polyimide substrate by microcontact printing and selective surface modification
Patterned gold microstructures were fabricated on a polymer substrate by a novel method involving selective electroless plating and microcontact printing. The micro-sized gold patterns were made by the site-selective chemical modification of polyimide substrate films using aqueous potassium hydroxid...
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Veröffentlicht in: | Microelectronic engineering 2008, Vol.85 (1), p.136-142 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Patterned gold microstructures were fabricated on a polymer substrate by a novel method involving selective electroless plating and microcontact printing. The micro-sized gold patterns were made by the site-selective chemical modification of polyimide substrate films using aqueous potassium hydroxide solution and microcontact printing with a pitch size in the range of 20–200
μm. The base-treated area of the polyimide film became hydrophilic in the regions where the ion-exchange reactions took place for the subsequent metallization. The hydrophilic patterns were sensitized by placing the film in a solution of PdCl
2 and, subsequently, the activated substrate was immersed in an electroless plating solution of Ni and Au to provide well-developed gold patterns on polyimide substrate films. |
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ISSN: | 0167-9317 1873-5568 |
DOI: | 10.1016/j.mee.2007.04.142 |