Vertical poly-Si select pn-diodes for emerging resistive non-volatile memories
Vertical polycrystalline silicon pn-diodes have been investigated as the select device for resistive non-volatile memories. The diodes have been fabricated up to the metal-1 level using basic processing steps of a CMOS front-end-of-line for 65 nm node and beyond. The study of the electric properties...
Gespeichert in:
Veröffentlicht in: | Microelectronic engineering 2007-12, Vol.84 (12), p.2921-2926 |
---|---|
Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | Vertical polycrystalline silicon pn-diodes have been investigated as the select device for resistive non-volatile memories. The diodes have been fabricated up to the metal-1 level using basic processing steps of a CMOS front-end-of-line for 65
nm node and beyond. The study of the electric properties reveals that polycrystalline silicon diodes have a high current density in excess of 10
5
A/cm
2 and exhibit good rectification ratio, even at temperatures as high as 125
°C. Besides single devices, cross-point arrays with polycrystalline Silicon diodes have also been investigated. |
---|---|
ISSN: | 0167-9317 1873-5568 |
DOI: | 10.1016/j.mee.2007.03.009 |