Polymer-Silicon Flexible Structures for Fast Chemical Vapor Detection

Stimuli‐responsive microactuators controlled by the interfacial stress across the polymer/silicon interface are introduced as simple, miniature, and flexible sensing platforms for chemical vapor detection. The sensors detect water vapor with sensitivities of ± 10 parts per billion (±0.00005% relative humidity) and faster than previously recorded response times. These characteristics make the bimaterial silicon cantilevers excellent candidates for critical security and defense needs as well as for environmental monitoring.