Planar waveguide to vertical mode couplers covering the visible to IR spectral range
Planar 45 turning mirrors with metal coating embedded in SU8 polymer waveguides enable waveguide to vertical mode coupling across a broad range of wavelengths from the visible to IR. The fabrication of these 2.5D structures is achieved using relatively simple grayscale lithography in thin film resis...
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Veröffentlicht in: | Optics express 2024-10, Vol.32 (22), p.38128 |
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Hauptverfasser: | , , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | Planar 45
turning mirrors with metal coating embedded in SU8 polymer waveguides enable waveguide to vertical mode coupling across a broad range of wavelengths from the visible to IR. The fabrication of these 2.5D structures is achieved using relatively simple grayscale lithography in thin film resists, compatible with standard planar lithography methods. Mirror losses of |
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ISSN: | 1094-4087 1094-4087 |
DOI: | 10.1364/OE.539044 |