Planar waveguide to vertical mode couplers covering the visible to IR spectral range

Planar 45 turning mirrors with metal coating embedded in SU8 polymer waveguides enable waveguide to vertical mode coupling across a broad range of wavelengths from the visible to IR. The fabrication of these 2.5D structures is achieved using relatively simple grayscale lithography in thin film resis...

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Veröffentlicht in:Optics express 2024-10, Vol.32 (22), p.38128
Hauptverfasser: Cassells, Ross, Smith, Jack A, Hu, Changyu, Bommer, Sean P, Guilhabert, Benoit, Dawson, Martin D, Strain, Michael J
Format: Artikel
Sprache:eng
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Zusammenfassung:Planar 45 turning mirrors with metal coating embedded in SU8 polymer waveguides enable waveguide to vertical mode coupling across a broad range of wavelengths from the visible to IR. The fabrication of these 2.5D structures is achieved using relatively simple grayscale lithography in thin film resists, compatible with standard planar lithography methods. Mirror losses of
ISSN:1094-4087
1094-4087
DOI:10.1364/OE.539044