Estimation of losses caused by sidewall roughness in thin-film lithium niobate rib and strip waveguides

Samples of dielectric optical waveguides of rib or strip type in thin-film lithium niobate (TFLN) technology are characterized with respect to their optical loss using the Fabry-Pérot method. Attributing the losses mainly to sidewall roughness, we employ a simple perturbational procedure, based on rigorously computed mode profiles of idealized channels, to estimate the attenuation for waveguides with different cross sections. A single fit parameter suffices for an adequate modelling of the effect of the waveguide geometry on the loss levels.