Real-time focus control in broad flat field laser material processing

Broad flat field laser scanning is critical to the success of laser material processing, used in techniques such as rapid prototyping & manufacturing (RP&M) and micro-machining. For these techniques it is necessary to produce high-performance optical systems that can fulfill the need for a smaller focused spot size over broad, flat field scanning areas. This paper concentrates on the issues of defocus error compensation. A dynamic focusing system is designed, intended primarily for broad flat field galvanometric laser scanning applications. Key technologies are described in detail; corresponding solutions have been used to design and produce a CO 2 infrared optical focusing system, which is capable of scanning a focused spot size of 120 μm or less over areas up to 500 mm 2.