Detailed analysis of gyroid structures in diblock copolymer thin films with synchrotron grazing-incidence X-ray scattering

In this study, a grazing‐incidence X‐ray scattering (GIXS) formula was derived for gyroid structures formed in thin films supported on substrates. Two‐dimensional GIXS patterns were measured for gyroid structures formed in polystyrene‐b‐polyisoprene (PS‐b‐PI) diblock copolymer nanometre‐scale thin films supported on silicon substrates, and a quantitative analysis of the obtained two‐dimensional GIXS data was conducted with the scattering formula. This analysis provided details (lattice parameter, width of the PS phase, positional distortion factor, orientation and orientation distribution) of the gyroid structures developed in the diblock copolymer thin films that are not easily obtained using conventional techniques. Moreover, it was possible to simulate complete and detailed two‐dimensional GIXS patterns with the determined structure parameters.