The deposition of Sm1Ba2Cu3O7-δ on SrTiO3 using co-evaporation method

The SmBCO(Sm1Ba2Cu3O7-delta) films were deposited on SrTiO3 substrates using co-evaporation method. The deposition system was specially designed, that is named evaporation using drum in dual chambers, as the following features. The deposition system consists of reaction chamber and evaporation one. The role of reaction chamber is for the deposited materials to react with oxygen gas, and that of the evaporation chamber is to evaporate the composing elements of SmBCO, respectively. The composition ratio of SmBCO is controlled by the deposition rate of each element. The drum of 50cm of diameter and 72cm of length is located between the reaction chamber and the evaporation chamber. By rotating the drum, deposition and reaction process are repeated. In this system, SmBCO films were deposited on SrTiO3 single crystal substrates. We obtained Ic and Jc results of 83.3A/cm and 2.1MA/cm2 at 77K in self-field.