Surface characterization and microstructure of ITO thin films at different annealing temperatures

In this study, the electron beam evaporation method is used to generate an indium tin oxide (ITO) thin film on a glass substrate at room temperature. The surface characteristics of this ITO thin film are then investigated by means of an AFM (atomic force microscopy) method. The influence of postgrow...

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Veröffentlicht in:	Applied surface science 2007-09, Vol.253 (23), p.9085-9090
Hauptverfasser:	Raoufi, Davood, Kiasatpour, Ahmad, Fallah, Hamid Reza, Rozatian, Amir Sayid Hassan
Format:	Artikel
Sprache:	eng
Schlagworte:	Condensed matter: structure, mechanical and thermal properties Electron beam evaporation Exact sciences and technology Fractal analysis ITO thin film Morphology Physics Single-crystal and powder diffraction Structure and morphology thickness Structure of solids and liquids crystallography Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Thermal annealing Thin film structure and morphology X-ray diffraction and scattering
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