Plasma-Enhanced CVD for Particle Synthesis Using Circulating Fluidized Bed Technology

Circulating fluidized beds (CFB) are widely used for gas‐solid reactions. This presentation summarizes specific design and operational features for a CFB system with a non‐thermal plasma. The results of coating a glass‐like material using salt particles as a model substrate are shown. The potential of the new technology is broad, due to the fact that plasma‐enhanced (PE)CVD can be used to combine and treat virtually any two different materials at low temperatures. The circulating fluidized bed (CFB) is a reliable reactor concept for efficient gas solid reactions. The combination of a CFB and the PECVD technology is a promising process to deposit thin films on particulate substrates in order to adjust specific characteristics of powders. This article summarizes specific design and operation features for such a system. The results of deposition of glasslike layers on salt particles are shown.