An intelligent bipolar actuation method with high stiction immunity for RF MEMS capacitive switches and variable capacitors

An intelligent bipolar actuation method with high stiction immunity for RF MEMS capacitive switches and variable capacitors

We propose an intelligent bipolar actuation (IBA) method for electrostatic actuators, which can suppress stiction induced by dielectric charging. The high stiction immunity is achieved by flipping the bias voltage polarity depending on the pull-out voltage, thereby restricting the amount of charge s...

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Veröffentlicht in:Sensors and actuators. A. Physical. 2007-09, Vol.139 (1), p.233-236
Hauptverfasser: Yamazaki, Hiroaki, Ikehashi, Tamio, Ohguro, Tatsuya, Ogawa, Etsuji, Kojima, Kenji, Ishimaru, Kazunari, Ishiuchi, Hidemi
Format: Artikel
Sprache:eng
Schlagworte:
Capacitive switch
Dielectric charging
Intelligent bipolar actuation
Pull-out voltage
RF MEMS
Stiction
Variable capacitor
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Beschreibung
Zusammenfassung:We propose an intelligent bipolar actuation (IBA) method for electrostatic actuators, which can suppress stiction induced by dielectric charging. The high stiction immunity is achieved by flipping the bias voltage polarity depending on the pull-out voltage, thereby restricting the amount of charge stored in the dielectric film.
ISSN:0924-4247
1873-3069
DOI:10.1016/j.sna.2007.03.014