Grafted Conducting Polymer Films for Nano-patterning onto Various Organic and Inorganic Substrates by Oxidative Chemical Vapor Deposition

Conductive polymer chains were directly grafted on a variety of organic substrates containing aromatic functionalities. In this one‐step mechanism, the covalent linkages between the substrates and the conducting polymers are created. The enhanced adhesion by grafting enables high‐resolution patterning (down to 60 nm) of grafted PEDOT films using standard lithographic techniques without any modification of the patterning processes.