Experimental studies on TiN film sputter coating on the inner face of stainless steel pipe

Experimental studies on TiN film sputter coating on the inner face of stainless steel pipe

An analysis of experiments of TiN coating on pipe surface was conducted employing the splutter coating system, and suitable parameters of vacuum chamber surface TiN coating was obtained. The experiment results show that TiN film on chamber surface with proper characteristics can be achieved at 80~90...

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Veröffentlicht in:Zhōngguó kēxué jìshù dàxué xuébào 2007-05, Vol.37 (4-5), p.509-513
Hauptverfasser: Wang, Yong, Zhang, Yao-Feng, Wei, Wei, Wang, Jian-Ping, Fan, Le, Jiang, Dao-Man, Zhu, Cun-Bao, Liu, Zu-Ping
Format: Artikel
Sprache:chi
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Zusammenfassung:An analysis of experiments of TiN coating on pipe surface was conducted employing the splutter coating system, and suitable parameters of vacuum chamber surface TiN coating was obtained. The experiment results show that TiN film on chamber surface with proper characteristics can be achieved at 80~90 Pa and 160~180 deg C of coated surface temperature.
ISSN:0253-2778