The formation of supported monodisperse Au nanoparticles by UV/ozone oxidation process

The influence of surface preparation of GaAs (1 0 0)- and (1 1 l)B-oriented substrates on the self-assembly of Au nanoparticles has been investigated. It has been shown that an UV/ozone surface oxidation process, applied prior to the deposition of a thin Au film, enables the formation of well-distri...

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Veröffentlicht in:Applied surface science 2006-12, Vol.253 (4), p.2348-2354
Hauptverfasser: Plante, M.C., Garrett, J., Ghosh, S.C., Kruse, P., Schriemer, H., Hall, T., LaPierre, R.R.
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container_end_page 2354
container_issue 4
container_start_page 2348
container_title Applied surface science
container_volume 253
creator Plante, M.C.
Garrett, J.
Ghosh, S.C.
Kruse, P.
Schriemer, H.
Hall, T.
LaPierre, R.R.
description The influence of surface preparation of GaAs (1 0 0)- and (1 1 l)B-oriented substrates on the self-assembly of Au nanoparticles has been investigated. It has been shown that an UV/ozone surface oxidation process, applied prior to the deposition of a thin Au film, enables the formation of well-distributed Au particles that are very uniform in size. Particles of 4.5 plus/minus 1.4 nm diameter have been obtained by the appropriate heat treatment of a 1-nm-thick Au film. The general applicability of this approach has been demonstrated by reproducing the results on a Si (1 1 1) substrate. The process therefore yielded comparable results independent of the surface orientation. Possible operative mechanisms are discussed including Ostwald ripening, particle migration and coalescence, and Coulomb repulsion of the Au deposition.
doi_str_mv 10.1016/j.apsusc.2006.05.113
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title The formation of supported monodisperse Au nanoparticles by UV/ozone oxidation process
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