The formation of supported monodisperse Au nanoparticles by UV/ozone oxidation process
The influence of surface preparation of GaAs (1 0 0)- and (1 1 l)B-oriented substrates on the self-assembly of Au nanoparticles has been investigated. It has been shown that an UV/ozone surface oxidation process, applied prior to the deposition of a thin Au film, enables the formation of well-distri...
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Veröffentlicht in: | Applied surface science 2006-12, Vol.253 (4), p.2348-2354 |
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Hauptverfasser: | , , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | The influence of surface preparation of GaAs (1 0 0)- and (1 1 l)B-oriented substrates on the self-assembly of Au nanoparticles has been investigated. It has been shown that an UV/ozone surface oxidation process, applied prior to the deposition of a thin Au film, enables the formation of well-distributed Au particles that are very uniform in size. Particles of 4.5 plus/minus 1.4 nm diameter have been obtained by the appropriate heat treatment of a 1-nm-thick Au film. The general applicability of this approach has been demonstrated by reproducing the results on a Si (1 1 1) substrate. The process therefore yielded comparable results independent of the surface orientation. Possible operative mechanisms are discussed including Ostwald ripening, particle migration and coalescence, and Coulomb repulsion of the Au deposition. |
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ISSN: | 0169-4332 |
DOI: | 10.1016/j.apsusc.2006.05.113 |