Preparation of FeCoZrBCu Thin Films and their Effect of Microstructure on Magnetic Properties

In this work, (Fe,Co)–Zr–B–Cu films have been deposited on glass and Si substrates by DC magnetron sputtering method. X-ray diffraction analysis was used to identify the structure of the films. A transmission electron microscope (TEM) was employed to observe the microstructure for the films. Magnetic properties at room temperature were investigated by a Vibrating Sample Magnetometer (VSM). It was obtained that the as-deposited films on glass and Si substrates were in an amorphous state. In addition, it has been found that the coercivity is dependent on film thicknesses.