Hydrocarbon impurities in SiF4 and SiH4 prepared from it

Using gas chromatography and high-resolution Fourier-transform IR spectroscopy, we have determined the concentrations of C1-C4 hydrocarbon impurities in isotopically unmodified silicon tetrafluoride before and after fine purification and in Si-enriched SiF4. The concentrations of C1-C4 hydrocarbon impurities in silicon tetrafluoride for SiH4 synthesis have been shown to correlate with those in the synthesized silane.