AFM AND SEM INVESTIGATIONS OF ION BEAM SYNTHESIZED Mg2Si PRECIPITATES IN Si SUBSTRATES

AFM AND SEM INVESTIGATIONS OF ION BEAM SYNTHESIZED Mg2Si PRECIPITATES IN Si SUBSTRATES

The Mg2Si phase was fabricated using ion beam synthesis with high doses of 24Mg+ implantation in Si substrates, followed by rapid thermal annealing. The chemical composition of the as-implanted and of samples annealed under different conditions was studied by X-ray energy dispersive spectroscopy. Th...

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Veröffentlicht in:Journal of Optoelectronics and Advanced Materials 2005-02, Vol.7 (1), p.369-372
Hauptverfasser: Angelov, Ch, Mikli, V, Amov, B, Goranova, E
Format: Artikel
Sprache:eng
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Zusammenfassung:The Mg2Si phase was fabricated using ion beam synthesis with high doses of 24Mg+ implantation in Si substrates, followed by rapid thermal annealing. The chemical composition of the as-implanted and of samples annealed under different conditions was studied by X-ray energy dispersive spectroscopy. The effect of the different doses and annealing time on the surface morphology was investigated by scanning electron microscopy and atomic force microscopy.
ISSN:1454-4164