Fabrication of flexible and transparent single-wall carbon nanotube gas sensors by vacuum filtration and poly(dimethyl siloxane) mold transfer

We report on the fabrication of density controlled single-wall carbon nanotube (SWCNT) thin-films on poly(dimethyl siloxane) (PDMS) substrates by vacuum filtration and PDMS direct molding. The vacuum filtration method made it possible to form a thin-film of SWCNTs having uniform density over a large...

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Veröffentlicht in:Microelectronic engineering 2007-05, Vol.84 (5), p.1610-1613
Hauptverfasser: Woo, Chang-Seung, Lim, Chae-Hyun, Cho, Chi-Won, Park, Bonghyun, Ju, Heongkyu, Min, Dong-Hun, Lee, Cheol-Jin, Lee, Seung-Beck
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Sprache:eng
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Zusammenfassung:We report on the fabrication of density controlled single-wall carbon nanotube (SWCNT) thin-films on poly(dimethyl siloxane) (PDMS) substrates by vacuum filtration and PDMS direct molding. The vacuum filtration method made it possible to form a thin-film of SWCNTs having uniform density over a large area. The optical transmittance of the SWCNT thin-films showed inverse proportionality to SWCNT density and conductivity indicating that the SWCNT’s PDMS surface coverage was directly related to the thin-film’s optical and electrical characteristics. The flexible SWCNT thin-film showed high mechanical stability with negligible change in conductance after being bent by 180°. It was shown that SWCNT thin-film conductance had high sensitivity to NH 3 gas partial pressure and that the lower the density of SWCNTs the higher the sensitivity. The results show that the flexible SWCNT thin-films may be applicable to future high sensitivity mobile sensors.
ISSN:0167-9317
1873-5568
DOI:10.1016/j.mee.2007.01.162