A multi-sensor biological monitoring module built up in LTCC-technology

Low temperature co-fired ceramic (LTCC) technology was originally developed for the realization of multilayer circuits of high reliability. It was recognized that LTCC-technology is a valuable development in thick film technology which launches new application areas as it becomes evident that comple...

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Veröffentlicht in:	Microelectronic engineering 2007-05, Vol.84 (5), p.1240-1243
Hauptverfasser:	Smetana, Walter, Balluch, Bruno, Stangl, Günther, Gaubitzer, Erwin, Edetsberger, Michael, Köhler, Gottfried
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied fluid mechanics Applied sciences Biocompatibility Biological and medical sciences Biological monitoring module Biosensors Biotechnology Electronics Exact sciences and technology Fluid dynamics Fluidics Fundamental and applied biological sciences. Psychology Fundamental areas of phenomenology (including applications) Laser micromachining LTCC-technology Methods. Procedures. Technologies Microelectronic fabrication (materials and surfaces technology) Microfluidics Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Various methods and equipments
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Beschreibung
Zusammenfassung:	Low temperature co-fired ceramic (LTCC) technology was originally developed for the realization of multilayer circuits of high reliability. It was recognized that LTCC-technology is a valuable development in thick film technology which launches new application areas as it becomes evident that complex three-dimensional structures can be easily realized. Aspects of the realization of a sophisticated biological monitoring module comprising a three-dimensional network of channels and cavities is demonstrated.
ISSN:	0167-9317 1873-5568
DOI:	10.1016/j.mee.2007.01.155