Micro-opto-electro-mechanical system for X-ray focusing

A MOEMS system for 1-D focusing of X-rays has been fabricated using a thermal bimorph microcantilever to produce an element with variable focal length. A passive strain gauge is incorporated for feedback control of the zoom function. The focal length dependence on bimorph temperature has been measur...

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Veröffentlicht in:	Microelectronic engineering 2007-05, Vol.84 (5), p.1252-1255
Hauptverfasser:	Al-Aioubi, M., Prewett, P.D., Huq, S.E., Djakov, V., Michette, A.G.
Format:	Artikel
Sprache:	eng
Schlagworte:	Acoustic wave devices, piezoelectric and piezoresistive devices Applied sciences Electronics Exact sciences and technology MOEMS Optoelectronic devices Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices X-ray focusing
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Beschreibung
Zusammenfassung:	A MOEMS system for 1-D focusing of X-rays has been fabricated using a thermal bimorph microcantilever to produce an element with variable focal length. A passive strain gauge is incorporated for feedback control of the zoom function. The focal length dependence on bimorph temperature has been measured.
ISSN:	0167-9317 1873-5568
DOI:	10.1016/j.mee.2007.01.167