Plasma Deposition of Thiophene Derivatives Under Atmospheric Pressure

Plasma deposition of conjugated polymer films under atmospheric pressure is described. Three thiophene derivatives (thiophene, 3‐methylthiophene, and 3,4‐ethylenedioxythiophene) are used as monomers. The plasma depositions with the various precursors are compared using analytical techniques such as...

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Veröffentlicht in:Chemical vapor deposition 2006-12, Vol.12 (12), p.719-727
Hauptverfasser: Dams, R., Vangeneugden, D., Vanderzande, D.
Format: Artikel
Sprache:eng
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