Electronic Properties of GaN Films Grown on TiC Substrates
Crystalline GaN films were deposited on titanium carbide substrates by low-pressure organometallic vapour-phase epitaxy. Low background carrier concentration was verified by capacitance-voltage measurements. Low-temperature photoluminescence measurements indicated that the heteroepitaxial layer has...
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Veröffentlicht in: | Electrochemical and solid-state letters 2007-01, Vol.10 (2), p.H72-H73 |
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Hauptverfasser: | , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | Crystalline GaN films were deposited on titanium carbide substrates by low-pressure organometallic vapour-phase epitaxy. Low background carrier concentration was verified by capacitance-voltage measurements. Low-temperature photoluminescence measurements indicated that the heteroepitaxial layer has high crystalline quality, as verified by X-ray measurements, and is consistent with low background donor concentration near the film surface. 12 refs. |
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ISSN: | 1099-0062 |
DOI: | 10.1149/1.2402984 |