Electrical properties of ZnO Nano-particles embedded in polyimide

The ZnO nano-particles were made in the polyimide dielectric matrix by using the chemical reaction between the zinc metal film and polyamic acid. The concentration of the ZnO particle is about 1.5 × 10^sup 12^ cm^sup -2^, with average size below 10 nm, and its shapes are almost spherical. Then, the...

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Veröffentlicht in:	Journal of electronic materials 2006-04, Vol.35 (4), p.512-515
Hauptverfasser:	Kim, E K, Kim, J H, Noh, H K, Kim, Y H
Format:	Artikel
Sprache:	eng
Schlagworte:	Charging Chemical reactions Electric potential Electrical properties Insulators MIS (semiconductors) Nanoparticles Room temperature Semiconductors Silicon dioxide Silicon substrates Voltage Zinc oxide Zinc oxides
Online-Zugang:	Volltext
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