High-speed metal-based optical microscanners using stainless-steel substrate and piezoelectric thick films prepared by aerosol deposition method

High-speed metal-based optical microscanning devices were successfully fabricated in combination with piezoelectric thick films directly deposited by the aerosol deposition method (ADM) and specially designed stainless steel frame. A large optical scanning angle (41°) was achieved at a high resonance frequency (28.24 kHz) in ambient air without vacuum packaging. The well-polished metal-based mirror has good flatness of less than 105 nm, which is lower than λ/4. The metal-based microscanners enable faster scanning, higher scanning angles, lower production cost, and simpler fabrication processes.