HgCdTe focal plane arrays for dual-color mid- and long-wavelength infrared detection

Raytheon Vision Systems (RVS, Goleta, CA) in collaboration with HRL Laboratories (Malibu, CA) is contributing to the maturation and manufacturing readiness of third-generation, dual-color, HgCdTe infrared staring focal plane arrays (FPAs). This paper will highlight data from the routine growth and f...

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Veröffentlicht in:Journal of electronic materials 2004-06, Vol.33 (6), p.509-516
Hauptverfasser: SMITH, E. P. G, PHAM, L. T, COUSSA, R. A, KOSAI, K, RADFORD, W. A, GIEGERICH, L. M, EDWARDS, J. M, JOHNSON, S. M, BAUR, S. T, ROTH, J. A, NOSHO, B, DE LYON, T. J, VENZOR, G. M, JENSEN, J. E, LONGSHORE, R. E, NORTON, E. M, NEWTON, M. D, GOETZ, P. M, RANDALL, V. K, GALLAGHER, A. M, PIERCE, G. K, PATTEN, E. A
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Sprache:eng
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Zusammenfassung:Raytheon Vision Systems (RVS, Goleta, CA) in collaboration with HRL Laboratories (Malibu, CA) is contributing to the maturation and manufacturing readiness of third-generation, dual-color, HgCdTe infrared staring focal plane arrays (FPAs). This paper will highlight data from the routine growth and fabrication of 256 × 256 30-µm unit-cell staring FPAs that provide dual-color detection in the mid-wavelength infrared (MWIR) and long wavelength infrared (LWIR) spectral regions. The FPAs configured for MWIR/MWIR, MWIR/LWIR, and LWIR/LWIR detection are used for target identification, signature recognition, and clutter rejection in a wide variety of space and ground-based applications. Optimized triple-layer heterojunction (TLHJ) device designs and molecular beam epitaxy (MBE) growth using in-situ controls has contributed to individual bands in all dual-color FPA configurations exhibiting high operability (>99%) and both performance and FPA functionality comparable to state-of-the-art, single-color technology. The measured spectral cross talk from out-of-band radiation for either band is also typically less than 10%. An FPA architecture based on a single-mesa, single-indium bump, and sequential-mode operation leverages current single-color processes in production while also providing compatibility with existing second-generation technologies. [PUBLICATION ABSTRACT] Key words: Dual-color, focal plane array (FPA), mid-wavelength infrared (MWIR), long-wavelength infrared (LWIR), molecular beam epitaxy (MBE)
ISSN:0361-5235
1543-186X
DOI:10.1007/s11664-004-0039-4