Oxygen Recombination Coefficient on Catalytic Surfaces in Ar-02 Inductively Coupled Plasma by Actinometry

Atomic oxygen wall recombination coefficients at a high-temperature regime, more than 1300 K, and in a low static pressure environment are measured using the actinometric method for SiC, highly catalytic and SiO2 materials. For this purpose, the inductively coupled plasma of 02 with argon, as an actinometer, is employed. Measured values are compared with the numerical prediction obtained using the Kurotaki model. Agreement with the Kurotaki model is reasonable at least qualitatively.