A Vaporizer for Decaborane and Octadecaborane

Decaborane (B10H14) and Octadecaborane (B18H22) are two promising new doping materials for performing very shallow boron implants at high implanter throughput. However, because these new materials are low-vapor pressure solids at room temperature, their delivery to the implanter's ion source re...

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Bibliographische Detailangaben

Hauptverfasser:	Adams, Doug, Horsky, Tom, Gilchrist, Glen, Milgate, Robert, Sweeney, Joe, Marganski, Paul
Format:	Tagungsbericht
Sprache:	eng
Online-Zugang:	Volltext
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