A Vaporizer for Decaborane and Octadecaborane

Decaborane (B10H14) and Octadecaborane (B18H22) are two promising new doping materials for performing very shallow boron implants at high implanter throughput. However, because these new materials are low-vapor pressure solids at room temperature, their delivery to the implanter's ion source requires specialized techniques to deliver the desired mass flow without condensation. Data are presented which describe several features of a vaporizer for producing Decaborane and Octadecaborane flows in a production environment. This paper will also focus on the critical design aspects of the vapor delivery system, including the effects of vaporizer geometry on vapor flow rate, the performance of various flow control systems, and the overall thermal design. In addition, data on physical and environmental, safety, and health properties of these materials are presented. The effectiveness of this system as a stable vapor source for an ion implanter will be described.