Three-dimensional rotor fabrication by focused-ion-beam chemical-vapor-deposition

Various shapes of three-dimensional nano-rotor have been fabricated using nano-sheet made by 30 kV Ga + focused-ion-beam chemical-vapor-deposition (FIB-CVD) in the current range from 5 to 200 pA with phenanthrene vapor as a precursor. A nano-rotor moving has been observed using electrostatic attract...

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Veröffentlicht in:	Microelectronic engineering 2006-04, Vol.83 (4), p.1221-1224
Hauptverfasser:	Igaki, Jun-ya, Kometani, Reo, Nakamatsu, Ken-ichiro, Kanda, Kazuhiro, Haruyama, Yuichi, Ochiai, Yukinori, Fujita, Jun-ichi, Kaito, Takashi, Matsui, Shinji
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Electronics Exact sciences and technology Focused-ion-beam chemical-vapor-deposition Microelectronic fabrication (materials and surfaces technology) Nano-rotor Nano-sheet Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Three-dimensional
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Beschreibung
Zusammenfassung:	Various shapes of three-dimensional nano-rotor have been fabricated using nano-sheet made by 30 kV Ga + focused-ion-beam chemical-vapor-deposition (FIB-CVD) in the current range from 5 to 200 pA with phenanthrene vapor as a precursor. A nano-rotor moving has been observed using electrostatic attractive force and nitrogen gas blowing. Furthermore, the operational stability of four wings rotor with a longer axis has been confirmed by nitrogen gas blowing.
ISSN:	0167-9317 1873-5568
DOI:	10.1016/j.mee.2005.12.022