Structural and optical properties of MgxZn1-xO thin films grown by metal-organic chemical vapor deposition

High-quality MgxZn1-xO thin films were successfully grown on c-plane sapphire substrates by metal-organic chemical vapor deposition. The c-axis oriented MgxZn1-xO films were deposited on sapphire at the temperature of 600-630 deg C. The structural and optical properties of MgxZn1-xO films were inves...

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Veröffentlicht in:	Journal of crystal growth 2004-07, Vol.268 (1-2), p.140-143
Hauptverfasser:	Zhang, Yuantao, Du, Guotong, Liu, Dali, Zhu, Huichao, Cui, Yongguo, Dong, Xin, Yang, Shuren
Format:	Artikel
Sprache:	eng
Schlagworte:	Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) Condensed matter: electronic structure, electrical, magnetic, and optical properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Materials science Methods of deposition of films and coatings film growth and epitaxy Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity) Optical constants: refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Optical properties of bulk materials and thin films Physics
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Zusammenfassung:	High-quality MgxZn1-xO thin films were successfully grown on c-plane sapphire substrates by metal-organic chemical vapor deposition. The c-axis oriented MgxZn1-xO films were deposited on sapphire at the temperature of 600-630 deg C. The structural and optical properties of MgxZn1-xO films were investigated using X-ray diffraction (XRD) and the transmittance spectrum. MgO phase separation was not observed with Mg content up to x=0.39. The optical band gaps of MgxZn1-xO alloys (0x0.39) range from 3.3 to 3.95eV.
ISSN:	0022-0248 1873-5002
DOI:	10.1016/j.jcrysgro.2004.04.110