Superior Dose and Energy Monitoring Capability of the Therma-Probe System

The repeatability of the Therma-Probe(R)-XP TP630XP series ion implant monitoring system is investigated and the implications on implant monitoring capabilities of the system discussed. Improvements in tool stability enable 10-day average dose detectability of 2% 3 using conventional on-the-fly measurements, and 0.6% 3 using a recently introduced spatial averaging measurement mode. Dose detectability is the tool's figure of merit that combines both tool sensitivity and stability in a single parameter defining the noise-limited dose resolution of an ion implant metrology tool. The superior dose resolution of the Therma-Probe(R)-XP system enables implementation of in-line statistical process control for ion implant processes.