Development of a Microstrip SiC MMIC Process

A generic microstrip MMIC process targeted for SiC and GaN technology has been developed. Passive components for high power operation were developed and verified. Circuit models for both passive and active components have been formulated. Using the developed MMIC process an amplifier and a limiter h...

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Veröffentlicht in:Materials science forum 2006-10, Vol.527-529, p.1123-1126
Hauptverfasser: Südow, Mattias, Ståhl, Johan, Andersson, Kristoffer, Nilsson, Joakim, Nilsson, Per Åke, Zirath, Herbert, Rorsman, Niklas, Billström, Niklas
Format: Artikel
Sprache:eng
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Zusammenfassung:A generic microstrip MMIC process targeted for SiC and GaN technology has been developed. Passive components for high power operation were developed and verified. Circuit models for both passive and active components have been formulated. Using the developed MMIC process an amplifier and a limiter have been manufactured.
ISSN:0255-5476
1662-9752
1662-9752
DOI:10.4028/www.scientific.net/MSF.527-529.1123