Using active carbon pellet as substrate for deposition diamond by MPCVD

In this letter, we proposed the use of active carbon pellet as substrates for the deposition of diamond films. A series of depositions were done on the different substrates prepared in different ways and compositions. The morphologies of the as-deposition films were analyzed by scanning electron mic...

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Veröffentlicht in:Materials letters 2005-06, Vol.59 (13), p.1673-1677
Hauptverfasser: Tang, Xin, Zhao, Bin Yuan, Hu, Ke Ao
Format: Artikel
Sprache:eng
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Zusammenfassung:In this letter, we proposed the use of active carbon pellet as substrates for the deposition of diamond films. A series of depositions were done on the different substrates prepared in different ways and compositions. The morphologies of the as-deposition films were analyzed by scanning electron microscopy. Raman spectroscopy was used to investigate the crystal structure and non-diamond impurities in the films deposited on various substrates. The ball-shaped diamond was evident, and the homogeneous and dense diamond films could be obtained by microwave plasma assisted CVD using acetone as C source diluted in hydrogen on the active carbon substrates cleaned in a solvent ultrasonic bath.
ISSN:0167-577X
1873-4979
DOI:10.1016/j.matlet.2004.12.058