Single-molecule transistor fabrication by self-aligned lithography and in situ molecular assembly

We describe the fabrication of single-molecule transistors by self-aligned lithography and in situ molecular assembly. Ultrathin metallic electrodes are patterned with a nanoscale interelectrode separation defined by the lateral oxidation of a thin layer of Al. Highly conjugated molecular units are sequentially assembled within the electrode gap by selective design of the molecular end group chemistry. The assembled devices display evidence of molecular conduction.