Replication of Metal-Based Microscale Structures

Replication of Metal-Based Microscale Structures

Technologies capable of economical mass production of metal-based high-aspect-ratio microscale structures (HARMS), with structural heights of several hundred mum offer the potential to realize many metal-based microdevices. In this paper, our recent research on high-temperature microscale compressio...

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Bibliographische Detailangaben
Hauptverfasser: Jiang, J, Meng, W J, Sinclair, G B, Stevens, C O, Lara-Curzio, E
Format: Tagungsbericht
Sprache:eng
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Beschreibung
Zusammenfassung:Technologies capable of economical mass production of metal-based high-aspect-ratio microscale structures (HARMS), with structural heights of several hundred mum offer the potential to realize many metal-based microdevices. In this paper, our recent research on high-temperature microscale compression molding of metal-based HARMS from surface-engineered, microscale, refractory metal inserts is summarized.
ISSN:0094-243X
DOI:10.1063/1.2436338