Optimising flash memory tunnel programming

Flash memory programming by means of Fowler–Nordheim tunnelling has been studied with the aim of minimising oxide degradation and, at the same time, limiting the program voltage and reducing the program time. The target has been obtained using a waveform composed of a few number of pulses. The progr...

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Veröffentlicht in:Microelectronic engineering 2004-04, Vol.72 (1), p.405-410
Hauptverfasser: Irrera, Fernanda, Fristachi, Teodoro, Caputo, Domenico, Riccò, Bruno
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Fristachi, Teodoro
Caputo, Domenico
Riccò, Bruno
description Flash memory programming by means of Fowler–Nordheim tunnelling has been studied with the aim of minimising oxide degradation and, at the same time, limiting the program voltage and reducing the program time. The target has been obtained using a waveform composed of a few number of pulses. The program accuracy has been validated by means of measurements on a set of flash cells. In particular, using 7 nm-thick tunnel oxide, program time and voltage of, respectively, 21 μs and 18 V, have been demonstrated for a target shift voltage of 1.5 V. Using the optimised waveform, cycling has negligible effects on the program window.
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subjects Applied sciences
Design. Technologies. Operation analysis. Testing
Electronics
Exact sciences and technology
Flash memory
Integrated circuits
Integrated circuits by function (including memories and processors)
Oxide degradation
Program time
Program voltage
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Trap dynamics
Tunnel programming
title Optimising flash memory tunnel programming
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