Pressure and vacuum servo control system based on vacuum pump

A novel pressure and vacuum servo control system is presented which adopts a vacuum pump. On the basis of the mathematical description of the system, the simulation on the system is implemented and the characteristics of the system are analyzed. According to the simulation result, the characteristics of the system are discussed and studied by experiment. The experiment results show that the pressure and vacuum servo control based on vacuum pump has good dynamic and static performance, strong robustness and good adaptive ability to the variety of the system parameters, and can fulfill high steady control accuracy and fast response effectively. The mathematical model of system is also confirmed by the experiment results.