Simulation of island aggregation influenced by substrate temperature, incidence kinetic energy and intensity in pulsed laser deposition

Using kinetic Monte Carlo method, we have simulated a pulsed energetic growth process in pulsed laser deposition. During the growth of film, substrate temperature mainly influences upon film morphology by directly enhancing the adatom mobility through the temperature-dependent thermal vibration. By...

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Veröffentlicht in:	Applied surface science 2006-11, Vol.253 (2), p.874-880
Hauptverfasser:	Zhang, Duanming, Guan, Li, Li, Zhihua, Pan, Guijun, Tan, Xinyu, Li, Li
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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