Processing and Applications of Aerosol-Assisted Chemical Vapor Deposition
The aerosol‐assisted (AA) CVD method involves the atomization of a precursor solution into fine, sub‐micrometer‐sized aerosol droplets which are delivered to a heated reaction zone and undergo evaporation, decomposition, and homogeneous and/or heterogeneous chemical reactions to form the desired pro...
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Veröffentlicht in: | Chemical vapor deposition 2006-10, Vol.12 (10), p.583-596 |
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Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | The aerosol‐assisted (AA) CVD method involves the atomization of a precursor solution into fine, sub‐micrometer‐sized aerosol droplets which are delivered to a heated reaction zone and undergo evaporation, decomposition, and homogeneous and/or heterogeneous chemical reactions to form the desired products. As a variant of conventional CVD processes, AACVD addresses the availability and delivery problems of the chemical precursors. A wide range of precursors can be used since volatility is no longer crucial, offering more possibilities to produce high‐quality CVD products at low cost. Some variants of AACVD have also been developed, such as AA combustion (C) CVD, electrostatic spray‐assisted vapor deposition (ESAVD), and electrostatic‐assisted aerosol jet deposition (EAAJD). These variants provide additional flexibility and capability to the AACVD‐based processes. AACVD‐based processes have attracted increasing interest in most of the CVD‐related areas, and have been widely used to synthesize various films, coatings, powders, composites, nanotubes and nanowires, etc. This review highlights the principles, applications, and recent progress of AACVD‐based processes.
A brief review is presented to highlight the recent progress in aerosol‐assisted CVD (AACVD). As a variant of conventional CVD, AACVD offers a flexible and cost‐effective deposition method, and an alternative solution to the availability and delivery problems of the chemical precursors in CVD process. The review covers the processing principle, variants of AACVD, applications, and an outlook for research and development in this area. |
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ISSN: | 0948-1907 1521-3862 |
DOI: | 10.1002/cvde.200600033 |